eagle-i University of Texas at San AntonioUniversity of Texas at San Antonio
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Barrel Etcher

eagle-i ID

http://utsa.eagle-i.net/i/00000135-5413-b970-d7c8-cf3780000000

Resource Type

  1. Plasma etcher

Properties

  1. Contact
    Ayon, Arturo A., Ph.D.
  2. Website(s)
    http://physics.utsa.edu/memslab/cleanroom.html
  3. Location
    MEMS Research Laboratory
 
RDFRDF
 
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    kcespedes
  3. created
    2012-02-06T13:12:03.919-06:00
  4. creator
    shoffmann
  5. modified
    2013-03-12T12:08:32.670-05:00

Copyright © 2016 by the President and Fellows of Harvard College
The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016